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Reduction of Liquid Bridge Force for 3D Microstructure Measurements

Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that...

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Tác giả chính: Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan), Akio Katsuki (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan), Takao Sajima (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan), Mitsuyoshi Fukuda (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan)
Định dạng: Other
Năm xuất bản: MDPI AG 2018
Chủ đề:
Technology: Engineering (General). Civil engineering (General)
Science: Biology (General) | Science: Physics
Science: Chemistry
Truy cập Trực tuyến:http://lrc.quangbinhuni.edu.vn:8181/dspace/handle/DHQB_123456789/4067
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http://lrc.quangbinhuni.edu.vn:8181/dspace/handle/DHQB_123456789/4067

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