Reduction of Liquid Bridge Force for 3D Microstructure Measurements
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that...
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MDPI AG
2018
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oai:localhost:DHQB_123456789-40672018-10-22T08:43:27Z Reduction of Liquid Bridge Force for 3D Microstructure Measurements Applied Sciences Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Akio Katsuki (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Takao Sajima (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Mitsuyoshi Fukuda (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Technology: Engineering (General). Civil engineering (General) Science: Biology (General) | Science: Physics Science: Chemistry Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that use an optical fiber probe. This probe consists of a stylus shaft with a diameter of 2.5 µm and a glass ball with a diameter of 5 µm attached to the stylus tip. In this study, the measurement system, placed in a vacuum vessel, is constructed suitably to prevent adhesion of the stylus tip to the measured surface caused by the surface force resulting from the van der Waals force, electrostatic force, and liquid bridge force. First, these surface forces are analyzed with the aim of investigating the causes of adhesion. Subsequently, the effects of pressure inside the vacuum vessel on surface forces are evaluated. As a result, it is found that the surface force is 0.13 µN when the pressure inside the vacuum vessel is 350 Pa. This effect is equivalent to a 60% reduction in the surface force in the atmosphere. 2018-09-11T03:26:26Z 2018-09-11T03:26:26Z 2016 Other http://lrc.quangbinhuni.edu.vn:8181/dspace/handle/DHQB_123456789/4067 MDPI AG |
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Trung tâm Học liệu Đại học Quảng Bình (Dspace) |
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Trung tâm Học liệu Đại học Quảng Bình (Dspace) |
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Technology: Engineering (General). Civil engineering (General) Science: Biology (General) | Science: Physics Science: Chemistry |
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Technology: Engineering (General). Civil engineering (General) Science: Biology (General) | Science: Physics Science: Chemistry Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Akio Katsuki (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Takao Sajima (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Mitsuyoshi Fukuda (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| description |
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that use an optical fiber probe. This probe consists of a stylus shaft with a diameter of 2.5 µm and a glass ball with a diameter of 5 µm attached to the stylus tip. In this study, the measurement system, placed in a vacuum vessel, is constructed suitably to prevent adhesion of the stylus tip to the measured surface caused by the surface force resulting from the van der Waals force, electrostatic force, and liquid bridge force. First, these surface forces are analyzed with the aim of investigating the causes of adhesion. Subsequently, the effects of pressure inside the vacuum vessel on surface forces are evaluated. As a result, it is found that the surface force is 0.13 µN when the pressure inside the vacuum vessel is 350 Pa. This effect is equivalent to a 60% reduction in the surface force in the atmosphere. |
| format |
Other |
| author |
Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Akio Katsuki (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Takao Sajima (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Mitsuyoshi Fukuda (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) |
| author_facet |
Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) Akio Katsuki (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Takao Sajima (Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan) Mitsuyoshi Fukuda (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) |
| author_sort |
Hiroshi Murakami (Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan) |
| title |
Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| title_short |
Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| title_full |
Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| title_fullStr |
Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| title_full_unstemmed |
Reduction of Liquid Bridge Force for 3D Microstructure Measurements |
| title_sort |
reduction of liquid bridge force for 3d microstructure measurements |
| publisher |
MDPI AG |
| publishDate |
2018 |
| url |
http://lrc.quangbinhuni.edu.vn:8181/dspace/handle/DHQB_123456789/4067 |
| _version_ |
1717292471137861632 |
| score |
9,463379 |